A FOUR LEVEL SILICON MICROSTRUCTURE FABRICATION BY DRIE
Paper in proceedings, 2015

Author

Piotr Cegielski

Chalmers, Microtechnology and Nanoscience (MC2)

Sofia Rahiminejad

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Sona Carpenter

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Morteza Abbasi

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

26th Micromechanics and Microsystems Europe Workshop, MME 2015, Toledo, Spain, September 20 - 23, 2015

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Subject Categories

Nano Technology

More information

Created

10/7/2017