High-Q Dispersion-Engineered Si3N4 Microresonators Based on a Subtractive Processing Technique
Paper in proceedings, 2020
We demonstrate dispersion-engineered Si3N4 microresonators with mean Q values >10 million fabricated using standard subtractive techniques. Soliton microcombs at 100 GHz line spacing and mode-locked dark-pulse Kerr combs are reported.
Author
Zhichao Ye
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Krishna Sundar Twayana
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Andrekson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Victor Torres Company
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Conference on Lasers and Electro-Optics, CLEO 2020
2020 Conference on Lasers and Electro-Optics
San Jose, USA,
San Jose, USA,
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Subject Categories
Accelerator Physics and Instrumentation
Aerospace Engineering
Atom and Molecular Physics and Optics
DOI
10.1364/CLEO_AT.2020.JTh2F.24