Microreplication in a Silicon Processing Compatible Polymer Material
Paper in proceedings, 2005

Author

Jonas Melin

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Anders Magnusson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Henrik Rödjegård

Katrin Persson

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Fredrik Nikolajeff

IEEE Optical Mems, Uleåborg, Finland, 1-4 August

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017