A valve-less planar pump isotropically etched in silicon
Paper in proceedings, 1995

Author

Anders Olsson

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

The Sixth Micromechanics Europe Workshop (MME'95), Copenhagen, Denmark, Sept. 3-5

120-123

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Information and Communication Technology

Life Science Engineering (2010-2018)

More information

Created

10/6/2017