Micromachining by sacrificial aluminium etching
Licentiate thesis, 1997
sacrificial aluminium etching
SALE
CMOS-compatible micromachining
aluminium etching
densitometer
surface micromachining
nozzle
sacrificial etching
inkjet
Author
David Westberg
Department of Solid State Electronics
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
992-460935-2
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 271