Oxygen plasma assisted silicon wafer bonding
Licentiate thesis, 2001
surface energy
diffusion
water
porous silica
oxygen plasma
wafer bonding
Author
Petra Amirfeiz
Department of Microelectronics, Solid State Electronics
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 401