Graphene Conductance Uniformity Mapping
Journal article, 2012
We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.
conductivity
epitaxial graphene
Graphene
electrodes
micro four-point probe
terahertz
imaging electrical characterization
metrology
terahertz
optoelectronics
4-point probe
large-area graphene
layer graphene
infrared-spectroscopy
films
Author
J. D. Buron
Technical University of Denmark (DTU)
D. H. Petersen
Technical University of Denmark (DTU)
P. Boggild
Technical University of Denmark (DTU)
D. G. Cooke
McGill University
M. Hilke
McGill University
Jie Sun
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
E. Whiteway
McGill University
P. F. Nielsen
Capres AS
O. Hansen
Technical University of Denmark (DTU)
Avgust Yurgens
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
P. U. Jepsen
Technical University of Denmark (DTU)
Nano Letters
1530-6984 (ISSN) 1530-6992 (eISSN)
Vol. 12 10 5074-5081Subject Categories
Physical Sciences
DOI
10.1021/nl301551a