Spin-Coated Heterogenous Stacked Electrodes for Performance Enhancement in CMOS-Compatible On-Chip Microsupercapacitors
Artikel i vetenskaplig tidskrift, 2022
Integration of microsupercapacitors (MSCs) with on-chip sensors and actuators with nanoenergy harvesters can improve the lifetime of wireless sensor nodes in an Internet-of-Things (IoT) architecture. However, to be easy to integrate with such harvester technology, MSCs should be fabricated through a complementary-metal-oxide-semiconductor (CMOS) compatible technology, ubiquitous in electrode choice with the capability of heterogeneous stacking of electrodes for modulation in properties driven by application requirements. In this article, we address both these issues through fabrication of multielectrode modular, high energy density microsupercapacitors (MSC) containing reduced graphene oxide (GO), GO-heptadecane-9-amine (GO-HD9A), rGO-octadecylamine (rGO-ODA), and rGO-heptadecane-9-amine (rGO-HD9A) that stack through a scalable, CMOS compatible, high-wafer-yield spin-coating process. Furthermore, we compare the performance of the stack with individual electrode MSCs fabricated through the same process. The individual electrodes, in the presence of 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfony)imide (EMIM-TFSI), demonstrate a capacitance of 38, 30, 36, and 105 μF/cm^2 at 20 mV/s^1 whereas the fabricated stack of electrodes demonstrates a high capacitance of 280 μF/cm^2 at 20 mV/s^1 while retaining and enhancing the material-dependent capacitance, charge retention, and power density.
modular
microsupercapacitors
CMOS
graphene
MEMS
stacking
spin coated
Författare
Agin Vyas
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Simin Zare Hajibagher
Student vid Chalmers
Ulises Mendez Romero
Chalmers, Kemi och kemiteknik, Tillämpad kemi
Shameel Thurakkal
Chalmers, Kemi och kemiteknik, Kemi och biokemi
Qi Li
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Mohammad Mazharul Haque
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Azega Rajendra Babu Kalai Arasi
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Ergang Wang
Chalmers, Kemi och kemiteknik, Tillämpad kemi
Xiaoyan Zhang
Chalmers, Kemi och kemiteknik, Kemi och biokemi
Per Lundgren
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Peter Enoksson
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Enoaviatech AB
Anderson David Smith
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
ACS Applied Energy Materials
25740962 (eISSN)
Vol. 5 4 4221-4231Drivkrafter
Hållbar utveckling
Styrkeområden
Transport
Ämneskategorier
Textil-, gummi- och polymermaterial
Materialkemi
Annan kemiteknik
Infrastruktur
Nanotekniklaboratoriet
DOI
10.1021/acsaem.1c03745