A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
Artikel i vetenskaplig tidskrift, 2018

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

bandwidth broadening

finite element modeling

coupled cantilevers

lead zirconate titanate

piezoelectric micro-energy harvester

microelectromechanical systems (MEMS)

enhanced stress distribution

Författare

Agin Vyas

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Henrik Staaf

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Cristina Rusu

RISE Research Institutes of Sweden

Thorbjoern Ebefors

MyVox AB

Jessica Liljeholm

Silex Microsystems AB

Anderson David Smith

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Micromachines

2072-666X (ISSN)

Vol. 9 5 252

Ämneskategorier

Datorteknik

Inbäddad systemteknik

Annan elektroteknik och elektronik

Drivkrafter

Hållbar utveckling

Styrkeområden

Nanovetenskap och nanoteknik (2010-2017)

Transport

Produktion

Energi

Infrastruktur

Nanotekniklaboratoriet

DOI

10.3390/mi9050252

Mer information

Senast uppdaterat

2019-10-03