A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
Artikel i vetenskaplig tidskrift, 2018

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

coupled cantilevers

piezoelectric micro-energy harvester

bandwidth broadening

enhanced stress distribution

lead zirconate titanate

finite element modeling

microelectromechanical systems (MEMS)

Författare

Agin Vyas

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Henrik Staaf

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Cristina Rusu

RISE Acreo

Thorbjoern Ebefors

MyVox AB

Jessica Liljeholm

Silex Microsystems AB

Anderson David Smith

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Micromachines

2072-666X (ISSN)

Vol. 9 252

Ämneskategorier

Datorteknik

Inbäddad systemteknik

Annan elektroteknik och elektronik

DOI

10.3390/mi9050252