Improved Tunable Performance of high Q-factor BaxSr1-xTiO3 Film Bulk Acoustic Wave Resonators

Paper i proceeding, 2012

Improved tunable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators (FBARs) achieved by varying Ba concentration. The Ba0.5Sr0.5TiO3 FBARs reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high figure of merit, Qf1300 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc bias induced piezoelectric effect in paraelectric phase ferroelectrics.