Piotr Cegielski

Showing 2 publications

2016

A four level silicon microstructure fabrication by DRIE

Sofia Rahiminejad, Piotr Cegielski, Morteza Abbasi et al
Journal of Microelectromechanical Systems. Vol. 26 (8), p. 084003-
Journal article
2015

A FOUR LEVEL SILICON MICROSTRUCTURE FABRICATION BY DRIE

Piotr Cegielski, Sofia Rahiminejad, Sona Carpenter et al
26th Micromechanics and Microsystems Europe Workshop, MME 2015, Toledo, Spain, September 20 - 23, 2015
Paper in proceedings

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