Tailoring and Characterisation of Nickel Silicide Thin Films on Silicon Carbide
Licentiate thesis, 2005
thin films
silicon carbide
nickel silicide
characterisation
Author
S. A. Perez-Garcia
Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering
Subject Categories (SSIF 2011)
Materials Engineering
Technical report - Department of Materials and Manufacturing Technology, Chalmers University of Technology: 5