Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications.
Paper in proceeding, 2003
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Pär Rundqvist
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Gigahertz Linköping
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering