An easy-to-implement method for evaluation of capacitive resonant sensors
Paper in proceeding, 2005
Author
Farzan Alavian Ghavanini
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Henrik Rödgergård
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
MicroMechanics Europe, MME´05, 4-6 September 2005
276-279
9163175533 (ISBN)
Subject Categories
Control Engineering
ISBN
9163175533