An easy-to-implement method for evaluation of capacitive resonant sensors
Paper in proceeding, 2005

Author

Farzan Alavian Ghavanini

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Henrik Rödgergård

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

MicroMechanics Europe, MME´05, 4-6 September 2005

276-279
9163175533 (ISBN)

Subject Categories

Control Engineering

ISBN

9163175533

More information

Created

10/6/2017