Microshutters for space physics time of flight applications
Paper in proceeding, 2010
Shutter
time-of-flight
MEMS
Author
Klas Brinkfelt
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
B Front
Chalmers, Microtechnology and Nanoscience (MC2)
Martin Wieser
M Emanuelsson
Stas Barabash
21st Micromechanics and Micro systems Europe workshop, 26-29 September 2010, Enschede, The Netherlands
140-143
Areas of Advance
Transport
Production
Subject Categories
Other Engineering and Technologies
Physical Sciences
Astronomy, Astrophysics and Cosmology
Electrical Engineering, Electronic Engineering, Information Engineering