Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflector
Journal article, 2011

A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba0.25Sr0.75TiO3 thin film and an all-dielectric HfO2/SiO2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.

Author

John Berge

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

0885-3010 (ISSN)

Vol. 58 12 2768-2771

Subject Categories

Other Materials Engineering

Areas of Advance

Materials Science

DOI

10.1109/TUFFC.2011.2142

More information

Created

10/6/2017