Modeling of a scalable coupled resonator array for microshutter applications
Paper in proceedings, 2011

In this paper we present the results from the finite element analysis of a scalable coupled resonator array for ultrafast microshutter applications. This new design concept builds on the design of a previous microshutter array, but couples the shutters to each other to allow them to move in a coupled antiphase resonance mode. Simulations for array scalability show that the resonance frequency does not change significantly when adding rows or columns to the array. The desired resonance mode stays present during scaling. Analyzing the sensitivity to changing dimensions results in slightly different amplitudes but no change in phase difference between adjacent shutters at the resonance frequency.


Dries Agten

Klas Brinkfelt

Martin Wieser

Stas Barabash

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

MME 22, Micromechanics and Micro systems Europe Workshop, June 19-22, 2011, Toensberg, Norway


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