Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN
Journal article, 2011
Author
Farzan Alavian Ghavanini
Chalmers, Applied Physics, Electronics Material and Systems
María Elena López Damián
Chalmers, Applied Physics, Electronics Material and Systems
Damon Rafieian
Chalmers, Applied Physics, Electronics Material and Systems
Krister Svensson
Karlstad University
Per Lundgren
Chalmers, Applied Physics, Electronics Material and Systems
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Sensors and Actuators, A: Physical
0924-4247 (ISSN)
Vol. 172 1 347-358Areas of Advance
Nanoscience and Nanotechnology
Transport
Production
Materials Science
Subject Categories
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1016/j.sna.2011.04.036