A valve-less planar pump in silicon
Paper in proceeding, 1995
Author
Anders Olsson
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
The 8th International Conference on Solid-State Sensors (TRANSDUCERS'95), Stockholm, Sweden, June 25-29
291-294
Subject Categories (SSIF 2011)
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Transport
Life Science Engineering (2010-2018)