A valve-less planar pump in silicon
Paper in proceeding, 1995
Author
Anders Olsson
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
The 8th International Conference on Solid-State Sensors (TRANSDUCERS'95), Stockholm, Sweden, June 25-29
291-294
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Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
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Life Science Engineering (2010-2018)