ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves
Paper in proceeding, 2012
films
baw resonators
Author
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Integrated Ferroelectrics
1058-4587 (ISSN)
Vol. 134 1 75-80 665295Cambridge, United Kingdom,
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1080/10584587.2012.665295