ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves
Journal article, 2012

ADS based Mason circuit model of solidly mounted FBARs is proposed where coexistence of both thickness mode longitudinal and shearwaves is assumed. While calculating the leakage of longitudinal and shear waves into the substrate via Bragg reflector the model takes into account multiple reflections from top and bottom electrodes. The results of modeling are useful in optimization of ferroelectric film deposition process and the design of the resonators.

films

baw resonators

Author

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Integrated Ferroelectrics

1058-4587 (ISSN)

Vol. 134 1 75-80

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1080/10584587.2012.665295

More information

Created

10/8/2017