ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves

Paper in proceeding, 2012

ADS based Mason circuit model of solidly mounted FBARs is proposed where coexistence of both thickness mode longitudinal and shearwaves is assumed. While calculating the leakage of longitudinal and shear waves into the substrate via Bragg reflector the model takes into account multiple reflections from top and bottom electrodes. The results of modeling are useful in optimization of ferroelectric film deposition process and the design of the resonators.