ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves
Journal article, 2012
ADS based Mason circuit model of solidly mounted FBARs is proposed where coexistence of both thickness mode longitudinal and shearwaves is assumed. While calculating the leakage of longitudinal and shear waves into the substrate via Bragg reflector the model takes into account multiple reflections from top and bottom electrodes. The results of modeling are useful in optimization of ferroelectric film deposition process and the design of the resonators.
baw resonators
films
Author
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Integrated Ferroelectrics
1058-4587 (ISSN) 16078489 (eISSN)
Vol. 134 1 75-80 665295Subject Categories
Applied Mechanics
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1080/10584587.2012.665295