Microwave characterization of intrinsically tunable FBARs
Paper in proceeding, 2012
Unlike the traditional piezoelectric film (AlN, ZnO etc.) based FBARs, the experimental characterization of the tunable ferroelectric FBARs typically start with low frequency DC measurements. In this work wide band microwave measurements are used to generate DC dependent analytic approximations for the parameters of the BVD model. Mason's model and curve fitting procedure is used to extract the DC bias dependent acousto-electric material parameters of the ferroelectric films.
FBAR
Microwave measurement
BVD model
Mason model
BAW
Acoustic resonator
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
IEEE MTT-S International Microwave Symposium Digest
0149645X (ISSN)
6258383978-146731087-1 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/MWSYM.2012.6258383
ISBN
978-146731087-1