Tuneable Film Bulk Acoustic Wave Resonators
Book, 2013
Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.
The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.
Film Bulk Acoustic Resonators - Paraelectric Phase Ferroelectrics - Resonant Frequency - Tuneable FBARs
Author
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Alexander Tagantsev
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Materials Science
Subject Categories
Other Engineering and Technologies
Nano Technology
Roots
Basic sciences
Driving Forces
Innovation and entrepreneurship
Infrastructure
Nanofabrication Laboratory
Learning and teaching
Pedagogical work
DOI
10.1007/978-1-4471-4944-6
ISBN
978-1-4471-4943-9