Impedance of DC-Bias-Controlled Composite FBARs
Journal article, 2013

A closed-form analytic formula is derived for composite resonators consisting of two layers of paraelectric-phase ferroelectrics. It is used to analyze the properties of these resonators. Under an applied dc electric field, the layers exhibit an induced piezoelectric effect. The signs of the induced piezoelectric coefficients may be changed by changing the polarity of the dc voltages applied to the layers. In the case of a composite in which the layers have similar thicknesses, changing the sign of the piezoelectric coefficient causes a switching between the resonant frequencies of the first and second harmonics. In the case in which one of the layers is substantially thinner, changing the sign of the piezoelectric coefficient causes switching of the resonant frequency of the first harmonic between two values. In both cases, a continuous change in the dc bias voltage causes continuous changes in the resonant frequencies.

Author

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

0885-3010 (ISSN)

Vol. 60 4 795-804

Subject Categories

Nano Technology

DOI

10.1109/TUFFC.2013.2628

More information

Created

10/7/2017