Nano-patterning of the electron gas at the LaAlO3/SrTiO3 interface using low-energy ion beam irradiation
Journal article, 2013

The quasi-two dimensional electron gas formed at the interface between LaAlO3 (LAO) and SrTiO3 (STO) shows fascinating properties, such as two-dimensional superconductivity, giant electric field effect, and the possible co-existence of ferromagnetic and superconducting phases. In this work, we demonstrate that the conducting LAO/STO interface can be made insulating after short irradiation by a beam of low energy Ar+ ions. The irradiation process does neither result in physical removal of the LAO film nor produces oxygen vacancies in the STO layer. Using electron beam lithography and low ion beam energy irradiation, we fabricated conducting nano-structures in the LAO/STO interface with dimensions down to 50 nm. Such a reliable and robust method of nano-patterning may be a prerequisite for future electronic applications of the LAO/STO interface.

Micro- and nanolithography

LAO/STO interface

Micro- and nanoscale pattern formation

Author

Pier Paolo Aurino

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Alexei Kalaboukhov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Nikolina Tuzla

Chalmers, Applied Physics, Eva Olsson Group

Eva Olsson

Chalmers, Applied Physics, Eva Olsson Group

Tord Claeson

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Dag Winkler

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Applied Physics Letters

0003-6951 (ISSN) 1077-3118 (eISSN)

Vol. 102 20 201610-

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Infrastructure

Nanofabrication Laboratory

Subject Categories

Condensed Matter Physics

DOI

10.1063/1.4807785

More information

Created

10/7/2017