The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides
Journal article, 2000
The strip currents in silicon substrate CPS and CPW induce longitudinal currents in the substrate (along the strips of the lines) causing extra microwave losses. It is shown that these losses may be minimized without introducing extra masks and process steps if the slot widths in the lines are chosen properly
losses
silicon
transmission lines
Author
Håkan Berg
Spartak Gevorgian
Department of Microelectronics and Nanoscience
International Journal of RF and Microwave Computer-Aided Engineering
1096-4290 (ISSN) 1099-047X (eISSN)
Vol. 10 5 284-288Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1002/1099-047X(200009)10:5<284::AID-MMCE3>3.0.CO;2-2