The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides
Journal article, 2000

The strip currents in silicon substrate CPS and CPW induce longitudinal currents in the substrate (along the strips of the lines) causing extra microwave losses. It is shown that these losses may be minimized without introducing extra masks and process steps if the slot widths in the lines are chosen properly

losses

silicon

transmission lines

Author

Håkan Berg

Spartak Gevorgian

Department of Microelectronics and Nanoscience

International Journal of RF and Microwave Computer-Aided Engineering

1096-4290 (ISSN) 1099-047X (eISSN)

Vol. 10 5 284-288

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1002/1099-047X(200009)10

More information

Created

10/6/2017