Component for electromagnetic waves and a method for manufacturing the same
Patent, 2007
The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.
Inventor
Leif Bergstedt
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
Marika Gustafsson
Patent information
Applicant
Telefonaktiebolaget LM Ericsson
Patent number
US07192882
Publication date
2007-03-19
Application number
10/500310
Application date
2002-12-26
Categorizing
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering