Micromechanical shutter based mass spectrometers
Paper in proceeding, 2009
Author
M Wieser
The Swedish Institute of Space Physics
S Barabash
The Swedish Institute of Space Physics
Martin Emanuelsson
The Swedish Institute of Space Physics
Klas Brinkfelt
Chalmers, Microtechnology and Nanoscience (MC2)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
AIP Conference Proceedings
0094-243X (ISSN) 1551-7616 (eISSN)
Vol. 1144 114-118978-073540681-0 (ISBN)
Subject Categories
Astronomy, Astrophysics and Cosmology
Other Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1063/1.3169274
ISBN
978-073540681-0