Focused electron beam based direct-write fabrication of graphene and amorphous carbon from oxo-functionalized graphene on silicon dioxide
Journal article, 2017

Controlled patterning of graphene is an important task towards device fabrication and thus is the focus of current research activities. Graphene oxide (GO) is a solution-processible precursor of graphene. It can be patterned by thermal processing. However, thermal processing of GO leads to decomposition and CO2 formation. Alternatively, focused electron beam induced processing (FEBIP) techniques can be used to pattern graphene with high spatial resolution. Based on this approach, we explore FEBIP of GO deposited on SiO2. Using oxo-functionalized graphene (oxo-G) with an in-plane lattice defect density of 1% we are able to image the electron beam-induced effects by scanning Raman microscopy for the first time. Depending on electron energy (2-30 keV) and doses (50-800 mC m(-2)) either reduction of GO or formation of permanent lattice defects occurs. This result reflects a step towards controlled FEBIP processing of oxo-G.

raman-spectroscopy

oxide

sheets

activation

Physics

microscopy

Chemistry

chemistry

defects

thermal reduction

graphite

nanostructures

Author

Severin Schindler

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry

F. Vollnhals

University of Erlangen-Nuremberg (FAU)

Luxembourg Institute of Science and Technology

C. E. Halbig

University of Erlangen-Nuremberg (FAU)

H. Marbach

University of Erlangen-Nuremberg (FAU)

H. P. Steinruck

University of Erlangen-Nuremberg (FAU)

C. Papp

University of Erlangen-Nuremberg (FAU)

Siegfried Eigler

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry

Physical Chemistry Chemical Physics

1463-9076 (ISSN) 1463-9084 (eISSN)

Vol. 19 4 2683-2686

Areas of Advance

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)

Subject Categories

Materials Chemistry

Condensed Matter Physics

DOI

10.1039/c6cp08070g

More information

Latest update

10/25/2022