Thin film Ba0.25Sr0.75TiO3 voltage tuneable capacitors on fused silica substrates for applications in microwave microelectronics
Paper in proceeding, 2006
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
John Berge
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
E-MRS IUMRS ICEM 2006, May 29 to June 2. Symposium J: Synthesis, Processing, and Characterization of Nanoscale Functional Oxide Films Acropolis Congress Centre, Nice, France.
Subject Categories
Other Materials Engineering