Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment
Journal article, 2002
cluster implantation
cluster implantation apparatus
ultra-high vacuum
clusters ion beams
hillocks
Author
Vladimir Popok
Chalmers, Department of Experimental Physics, Atomic Physics
Syargey Prasalovich
Chalmers, Department of Experimental Physics, Atomic Physics
Mattias Samuelsson
Chalmers, Department of Experimental Physics, Atomic Physics
Eleanor E.B. Campbell
Chalmers, Department of Experimental Physics, Atomic Physics
Review of Scientific Instruments
Vol. 73 12 4283-4287
Subject Categories (SSIF 2011)
Physical Sciences