GaN vertical-cavity surface-emitting laser with a high-contrast grating reflector
Paper in proceeding, 2018

We report a GaN-based VCSEL with a high-contrast grating (HCG) as the top mirror. The HCG consisted of TiO2 and rested directly on the n-GaN without an airgap or the use of any DBR layers to boost the reflectivity. The full VCSEL structure was optically pumped at room temperature and showed a lasing threshold of approximately 0.69MW/cm2 and a lasing wavelength at 369.1 nm. This first demonstration of lasing in a HCG GaN-based VCSEL opens up the possibility to explore all the potential benefits of HCGs in the blue and ultraviolet spectral regime.


high contrast grating (HCG)

vertical cavity surface emitting laser (VCSEL)



Tsu-Chi Chang

National Chiao Tung University

Shuo-Yi Kuo

National Chiao Tung University

Seyed Ehsan Hashemi

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Tien-chang Lu

National Chiao Tung University

Proceedings of SPIE - The International Society for Optical Engineering

0277-786x (ISSN) 1996-756x (eISSN)

Vol. 10542 105420T

High Contrast Metastructures VII 2018
San Fransisco, USA,

Ett komponent-fysikaliskt perspektiv på blå mikrokavitets-lasrar och resonanta lysdiodrar i III-nitrid-material

Swedish Energy Agency (2014-006476), 2015-01-01 -- 2018-12-31.

UV-blue-green resonant light-emitters

Swedish Foundation for Strategic Research (SSF) (IB13-0004), 2014-09-01 -- 2019-08-31.

Areas of Advance

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)

Subject Categories

Other Physics Topics

Electrical Engineering, Electronic Engineering, Information Engineering

Nano Technology

Condensed Matter Physics


Nanofabrication Laboratory



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