CMOS-compatible mid-IR metamaterial absorbers for out-of-band suppression in optical MEMS
Journal article, 2018
Author
Mohammadamir Ghaderi
Delft University of Technology
Ehsan Karimi Shahmarvandi
Delft University of Technology
Reinoud F Wolffenbuttel
Delft University of Technology
Optical Materials Express
21593930 (eISSN)
Vol. 8 7 1696-1707Subject Categories
Atom and Molecular Physics and Optics
Other Physics Topics
Condensed Matter Physics