CMOS-compatible mid-IR metamaterial absorbers for out-of-band suppression in optical MEMS
Journal article, 2018

Author

Mohammadamir Ghaderi

Delft University of Technology

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Ehsan Karimi Shahmarvandi

Delft University of Technology

Reinoud F Wolffenbuttel

Delft University of Technology

Optical Materials Express

2159-3930 (ISSN)

Vol. 8 7

Subject Categories

Atom and Molecular Physics and Optics

Other Physics Topics

Condensed Matter Physics

More information

Created

4/8/2019 1