Controlled Ultra-Thin Suboxide Films Generation in Metal-Oxide Systems by Ar+Ion Irradiation
Paper in proceeding, 2020
A method of controlled generation of metal suboxide films is proposed, basing on low-current ion sputtering of native oxides of ultra-thin metallic films and XPS chemical and phase depth profiling. Niobium suboxide ultra-thin films are generated and controlled using this approach.
Author
A. Lubenschenko
National Research University Moscow Power Engineering Institute
D. S. Lukyantsev
National Research University Moscow Power Engineering Institute
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory
D. A. Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
I. V. Ivanova
National Research University Moscow Power Engineering Institute
V. A. Iachuk
National Research University Moscow Power Engineering Institute
O. N. Pavlov
National Research University Moscow Power Engineering Institute
Journal of Physics: Conference Series
17426588 (ISSN) 17426596 (eISSN)
Vol. 1695 1 012025
7th International School and Conference "SaintPetersburg OPEN 2020" on Optoelectronics, Photonics, Engineering and Nanostructures
Saint Petersburg, Russia,
Saint Petersburg, Russia,
Subject Categories
Inorganic Chemistry
Materials Chemistry
Other Materials Engineering
DOI
10.1088/1742-6596/1695/1/012025