Controlled Ultra-Thin Suboxide Films Generation in Metal-Oxide Systems by Ar+Ion Irradiation
Paper in proceeding, 2020

A method of controlled generation of metal suboxide films is proposed, basing on low-current ion sputtering of native oxides of ultra-thin metallic films and XPS chemical and phase depth profiling. Niobium suboxide ultra-thin films are generated and controlled using this approach.

Author

A. Lubenschenko

National Research University Moscow Power Engineering Institute

D. S. Lukyantsev

National Research University Moscow Power Engineering Institute

Alexey Pavolotskiy

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

D. A. Ivanov

National Research University Moscow Power Engineering Institute

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

I. V. Ivanova

National Research University Moscow Power Engineering Institute

V. A. Iachuk

National Research University Moscow Power Engineering Institute

O. N. Pavlov

National Research University Moscow Power Engineering Institute

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1695 1 012025

7th International School and Conference "SaintPetersburg OPEN 2020" on Optoelectronics, Photonics, Engineering and Nanostructures
Saint Petersburg, Russia,

Subject Categories

Inorganic Chemistry

Materials Chemistry

Other Materials Engineering

DOI

10.1088/1742-6596/1695/1/012025

More information

Latest update

5/3/2021 1