Membrane-based VCSELs and LEDs by electrochemical etching
Other conference contribution, 2022
vcsel
electrochemical etching
membrane
led
Author
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Virtual; online, ,
Areas of Advance
Nanoscience and Nanotechnology
Materials Science
Subject Categories (SSIF 2011)
Physical Sciences
Other Materials Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology
Infrastructure
Chalmers Materials Analysis Laboratory
Nanofabrication Laboratory