Polymer-Based Micromachining for Scalable and Cost-Effective Fabrication of Gap Waveguide Devices Beyond 100 GHz

Doctoral thesis, 2023

The terahertz (THz) frequency bands have gained attention over the past few years due to the growing number of applications in fields like communication, healthcare, imaging, and spectroscopy. Above 100 GHz transmission line losses become dominating, and waveguides are typically used for transmission. As the operating frequency approaches higher frequencies, the dimensions of the waveguide-based components continue to decrease. This makes the traditional machine-based (computer numerical control, CNC) fabrication method increasingly challenging in terms of time, cost, and volume production. Micromachining has the potential of addressing the manufacturing issues of THz waveguide components. However, the current microfabrication techniques either suffer from technological immaturity, are time-consuming, or lack sufficient cost-efficiency. A straightforward, fast, and low-cost fabrication method that can offer batch fabrication of waveguide components operating at THz frequency range is needed to address the requirements.

A gap waveguide is a planar waveguide technology which does not suffer from the dielectric loss of planar waveguides, and which does not require any electrical connections between the metal walls. It therefore offers competitive loss performance together with providing several benefits in terms of assembly and integration of active components. This thesis demonstrates the realization of gap waveguide components operating above 100 GHz, in a low-cost and time-efficient way employing the development of new polymer-based fabrication methods.

A template-based injection molding process has been designed to realize a high gain antenna operating at D band (110 - 170 GHz). The injection molding of OSTEMER is an uncomplicated and fast device fabrication method. In the proposed method, the time-consuming and complicated parts need to be fabricated only once and can later be reused.

A dry film photoresist-based method is also presented for the fabrication of waveguide components operating above 100 GHz. Dry film photoresist offers rapid fabrication of waveguide components without using complex and advanced machinery.

For the integration of active circuits and passive waveguides section a straightforward solution has been demonstrated. By utilizing dry film photoresist, a periodic metal pin array has been fabricated and incorporated in a waveguide to microstrip transition that can be an effective and low-cost way of integrating MMIC of arbitrary size to waveguide blocks.