Quantifying the present and future environmental sustainability of cleanrooms
Journal article, 2024
climate change
future electricity mix
sustainability
cleanroom
life cycle assessment
Author
Justin Z. Lian
Leiden University
Flora Siebler
Leiden University
Bernhard Steubing
Leiden University
Aldo Jesorka
Chalmers, Chemistry and Chemical Engineering
Valerio Barbarossa
PBL Netherlands Environmental Assessment Agency
Leiden University
Ranran Wang
Leiden University
Karl Leo
Technische Universität Dresden
Indraneel Sen
Wasabi Innovations Ltd.
Stefano Cucurachi
Leiden University
Cell Reports Sustainability
29497906 (eISSN)
100219Proto-Opto-Electro-Mechanical Hybrid Systems for Generation-Next Bionic Devices (PROGENY)
European Commission (EC) (EC/H2020/899205), 2021-01-01 -- 2024-06-30.
Subject Categories
Environmental Analysis and Construction Information Technology
DOI
10.1016/j.crsus.2024.100219