Resonance technique for accurate on-wafer characterization of ferroelectric varactors
Paper in proceedings, 2007

A resonance technique for on-wafer characterization of ferroelectric varactors at microwave frequencies is proposed and experimentally verified. The approach is targeted on accurate assessment of the varactors losses if traditional approaches using planar transmission lines can not be used. A number of varactors based on 0.55um thick BSTO film are measured using the proposed approach and results are compared to those obtained with the broadband reflection type measurement. It is demonstrated that the resonance technique is more accurate and reliable.

resonators

microwave frequencies

Ferroelectric varactors

Author

Anatoli Deleniv

Chalmers, Applied Physics, Physical Electronics

Spartak Gevorgian

Chalmers, Applied Physics, Physical Electronics

Vladimir Sherman

Ecole Polytechnique Federale De Lausanne

T. Yamada

Ecole Polytechnique Federale De Lausanne

Nava Setter

Ecole Polytechnique Federale De Lausanne

IEEE MTT-S International Microwave Symposium Digest

0149645X (ISSN)

Vol. 3 2063-2066 4264274

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/MWSYM.2007.380292

ISBN

1424406889

More information

Latest update

5/3/2018 1