Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on BaxSr1-xTiO3 Films
Journal article, 2007

Electrically tunable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films are reported for the first time. The films are acoustically isolated from the silicon substrate by a Bragg reflector stack. Applying DC bias induces piezoelectric effect and an acoustic resonance at approximately 4 GHz. Under 10 V applied DC bias the resonance frequency of the resonators based on Ba0.25Sr0.75TiO3 films is tuned 1.2% to lower frequencies. The Q-factor of these resonators is approximately 120, and the electromechanical coupling coefficient is 0.5%. The resonant frequency of the BaTiO3 based resonators shifts upwards 1.3% under 10 V DC bias, and the -factor is approximately 30, with an electromechanical coupling coefficient of 6.2%.

Author

John Berge

Chalmers, Applied Physics, Physical Electronics

Andrei Vorobiev

Chalmers, Applied Physics, Physical Electronics

William Steichen

TEMEX

Spartak Gevorgian

Chalmers, Applied Physics, Physical Electronics

IEEE Microwave and Wireless Components Letters

1531-1309 (ISSN)

Vol. 17 9 655-657

Subject Categories

Other Materials Engineering

DOI

10.1109/LMWC.2007.903445

More information

Created

10/7/2017