Ultrathin Oxides in Metal-Oxide-Silicon Structures: Defects and Characterization
Doctoral thesis, 1999
PMA
interface state densities
silicon
aluminum oxide
Pb
ultrathin
RPECVD
MOS
Author
Lars-Åke Ragnarsson
Department of Microelectronics
Subject Categories
Physical Sciences
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
91-7197-812-7
Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 1511
Technical report - School of Electrical and Computer Engineering, Chalmers University of Technology, Göteborg, Sweden: 367