Development of processes for heterogeneous integration of ferroelectric films and devices in microwave systems
Paper in proceeding, 2008
Author
Andrei Vorobiev
Chalmers, Applied Physics, Physical Electronics
Spartak Gevorgian
Chalmers, Applied Physics, Physical Electronics
Electroceramics XI, 31 August - 3 September 2008, Manchester, UK
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering