Al/Nb Interface Study Based on the Analysis of the Energy Spectra of Reflected Electrons

Journal article, 2008

The interface between a Nb layer deposited on an Al layer is studied via comparison of measured and calculated reflected electron energy loss spectra. The interface region analysis is performed after layer-by-layer sputtering of the sample combined with Auger monitoring of its component composition. The elaborated spectrum calculation technique makes it possible to characterize Al and Nb distributions in the interface region with a nanometer resolution. The possibility of determining the number of phases at the Al/Nb interface is discussed.