Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film
Paper in proceeding, 2008
In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).
Author
Pavel Turalchuk
Saint Petersburg Electrotechnical University
Irina Vendik
Saint Petersburg Electrotechnical University
Orest Vendik
Saint Petersburg Electrotechnical University
John Berge
Chalmers, Applied Physics, Physical Electronics
38th European Microwave Conference, EuMC 2008; Amsterdam; Netherlands; 27 October 2008 through 31 October 2008
1695-1698
978-287487006-4 (ISBN)
Subject Categories
Other Materials Engineering
DOI
10.1109/EUMC.2008.4751801
ISBN
978-287487006-4