A monolithic three-axis SOI-accelerometer with uniform sensitivity
Journal article, 2005

This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions.


H. Rödjegård

Imego AB - The Institute of Micro and Nanotechnology

C. Johansson

Cellectricon AB

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2)

G. Andersson

Imego AB - The Institute of Micro and Nanotechnology

Sensors and Actuators, A: Physical

0924-4247 (ISSN)

Vol. 123-124 50-53

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering



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9/6/2018 1