pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
Journal article, 2010

pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

CHEMICAL SENSORS

TUNABLE

field effect sensor

FIELD-EFFECT TRANSISTORS

OXIDES

FABRICATION

DEVICES

IDENTICAL TRANSDUCER PRINCIPLE

PLD

MEMBRANE

APPLICATIONS

SENSING PROPERTIES

biosensor

barium strontium titanate

ISFET

Author

V. V. Buniatyan

State Engineering University of Armenia

Aachen University of Applied Sciences

M. H. Abouzar

Forschungszentrum Jülich

Aachen University of Applied Sciences

N. W. Martirosyan

State Engineering University of Armenia

J. Schubert

Forschungszentrum Jülich

Spartak Gevorgian

Chalmers, Applied Physics, Physical Electronics

M. J. Schoning

Aachen University of Applied Sciences

Forschungszentrum Jülich

A. Poghossian

Forschungszentrum Jülich

Aachen University of Applied Sciences

Physica Status Solidi (A) Applications and Materials Science

1862-6300 (ISSN) 1862-6319 (eISSN)

Vol. 207 4 824-830

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1002/pssa.200983310

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3/6/2018 8