Impact of the electrodes on the tunability of paraelectric BST film based FBARs
Paper in proceeding, 2010
Author
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010; Paris; 28 September 2010 through 30 September 2010
1210-1213
978-287487016-3 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
978-287487016-3