Vibration Modes of a Resonant Silicon Tube Density Sensor
Journal article, 1996
Author
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
IEEE/ASME Journal of Microelectromechanical Systems, Vol.5, No. 1
39-43
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production