Gas Damping of Electrostatically Excited Resonators
Paper in proceeding, 1996
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
EUROSENSORS X, Leuven, Belgium, Sept. 8-11
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Transport
Production