A low-pressure encapsulated DRIE resonant pressure sensor electrically excited and detected using `burst’ technology
Paper in proceeding, 1999
Author
Jessica Melin
Peter Enoksson
Department of Microelectronics
Thierry Corman
Göran Stemme
MME´99, Sept. 27-28, Gif-sus-Yvette, France
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Transport
Production
Energy
Materials Science