OXIDES
FILMS
DEPOSITION
MOSFETS
DIELECTRICS
INTEGRATION
University of Liverpool
University of Liverpool
University of Liverpool
University of Liverpool
University of Liverpool
Daresbury Laboratory
Daresbury Laboratory
FEI Company
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Forschungszentrum Jülich
Paul Drude Institut fur Festkorperelektronik
Forschungszentrum Jülich
0021-8979 (ISSN) 1089-7550 (eISSN)
Vol. 112 4 044102- 044102Information and Communication Technology
Nanoscience and Nanotechnology
Materials Engineering
Nano Technology
10.1063/1.4746790