Tunable FBARs: Intrinsic vs. extrinsic tunability
Paper in proceeding, 2012
The methods used to make the Film Bulk Acoustic Resonators (FBAR) tunable is reviewed. Intrinsically tunable FBARs make use ferroelectrics in ferroelectric and paraelectric (non-polar) phases have tunabilities up to 5% and more. Extrinsically tunable resonators are based on traditional piezoelectric FBARs and make use of external varactors and inductors. The low tunability (<2%) and low Q-factor (Q<100 due to tuning components) limits applications of these resonators.
Acoustic resonator
Tunable FBAR
FBAR
Author
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
IEEE MTT-S International Microwave Symposium Digest
0149645X (ISSN)
6258382978-146731087-1 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/MWSYM.2012.6258382
ISBN
978-146731087-1